| Working area size (Diameter * Height mm) | Φ200*300 | Φ300*600 | Φ400*900 |
|---|---|---|---|
| Ultimate vacuum (Pa) | 1*10-4 | 1*10-3 | 1*10-4 | 1*10-3 | 1*10-4 | 1*10-3 |
| Maximum temperature (°C) | 2400 | 2500 | 2400 | 2500 | 2400 | 2500 |
| Temperature uniformity (°C) | ±7.5 | ±7.5 | ±7.5 | ±10 |
| Pressure rise rate (Pa/h) | 0.67 | 0.67 | 0.67 |